Table 1 Epilayer thickness and optical properties.

1

Buffer sheet

10 µm above the AlN

1.5075 + i0.0002 (SiO₂)

2

AlN

4 µm

2.3147 (AlN)

2.3480 (AlN)

3

N-epilayer

1 µm

2.3723 (Al₉₀Ga₁₀N)

2.4285 (Al₇₀Ga₃₀N)

4

MQWs

18 nm

2.9532 (Al₆₀Ga₄₀N)

2.4775 (Al₆₁Ga₃₉N)

5

P-epilayer

25 nm

2.4774 + i0.1190 (Al₇₅Ga₂₅N)

2.378 + i0.0053 (Al_93.5Ga_6.5N)

6

P-epilayer

75 nm

2.6103 + i0.3400 (Al_28.5Ga_71.5N)

2.4285 + i0.0248 (Al₇₀Ga₃₀N)

7

P-epilayer

40 nm

2.6981 + i0.4760 (GaN)

2.6110 + i0.4760 (GaN)

9

P-contact

30 nm

1.1449 + i2.4307 (Pt)

10

N-contact

200 nm

1.7000 + i2.4500 (V)

11

Rear mirror

9 µm

0.2137 + i3.1494 (Al)