Table 8 Results of structure thermal deformation (ΔT = 1 K) under different layup error conditions.
Random error interval with per layer | 3σ-\(\alpha_{P}\)(10−6/K) | dy (nm) | Dz (nm) |
|---|---|---|---|
\([ - 5^{^\circ } , + 5^{^\circ } ]\) | 1.230 | 1718.52 | 1030.73 |
\({[} - {2}{\text{.5}}^{^\circ } {, + 2}{\text{.5}}^{^\circ } {]}\) | 0.812 | 818.11 | 680.46 |
\([ - 1^{^\circ } , + 1^{^\circ } ]\) | 0.589 | 337.74 | 493.58 |
\([ - 0.5^{^\circ } , + 0.5^{^\circ } ]\) | 0.510 | 167.56 | 427.38 |
\([ - 0.1^{^\circ } , + 0.1^{^\circ } ]\) | 0.450 | 38.31 | 377.10 |
No error | 0.434 | 3.416 | 363.52 |
