Fig. 8

Implantation distributions \(\rho (x)\) vs. stopping depth x from SRIM Monte Carlo code⁴⁶ simulation, represented as coloured histograms (with 60 bins), for various \(^{8}\text{Li}^{+}\) energies. Solid lines are fits to a phenomenological implantation distribution function (for details, see⁴⁷). The grey area indicates the commonly present \({{\text{Nb}}_{2}{\text{O}}_{5}}\) native-oxide layer with typical thickness of \(\sim\) 5 nm.