Fig. 4
Experimental and modelled spectral ellipsometry parameters (a, c, e, g, i, k) Ψ and (b, d, f, h, j, l) Δ taken at 10 different angles of incidence from 20° to 65° in the spectral range from 210 to 1000 nm using a RC2 spectral ellipsometer from J.A. Woollam. Solid lines represent experimental and dashed lines represent modelled data. We used 1.5 × 1.5 cm2 large Si/100 nm NiCr (NiCr sample) and a Si/100 nm NiCr/5 nm Ti (NiCr/Ti sample) substrates for reference measurements. Mean square error (MSE) for fitted samples NiCr, NiCr/Ti, t1, t2, t3 and t4 are 0.078, 0.177, 0.676, 0.625, 0.772 and 0.801, respectively.
