Table 5 Mesh-independence verification results.

From: Multi objective optimization and experimental investigation of the stirring performance of a novel micro actuator

Number of elements

Z-direction amplitude \(A_{\textrm{z}_{\textrm{max}}}\) (\(\mathrm {\mu }\)m)

Stirring Force \(F_{\textrm{s}_{\textrm{max}}}\) (N)

15,244

27.44

0.78

25,835

23.56

0.65

38,651

19.86

0.54

65,832

19.80

0.54

89,909

19.69

0.53

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