Table 8 FE simulation results.

From: Multi objective optimization and experimental investigation of the stirring performance of a novel micro actuator

 

Impact factor

Response value

Test number

\(x_{1}\)(mm\(^{2}\))

\(x_{2}\)(\(^{\circ }\))

\(x_{3}\)(mm)

\(x_{4}\)(mm)

\(y_{1}\)(\({\upmu }\)m)

\(y_{2}\)(N)

1

5.236

65

0.30

6.75

6.03

0.106

2

4.646

67

0.35

7.50

4.48

0.084

3

5.826

63

0.35

7.50

5.41

0.117

4

5.236

65

0.40

8.25

4.43

0.093

5

5.826

63

0.45

6.00

3.88

0.157

6

4.646

63

0.45

7.50

8.04

0.243

7

5.236

69

0.40

6.75

26.52

0.757

8

4.646

63

0.35

6.00

6.99

0.196

9

4.646

67

0.45

7.50

14.25

0.458

10

5.826

67

0.35

6.00

22.73

0.629

11

5.236

65

0.50

6.75

4.13

0.155

12

4.056

65

0.40

6.75

6.53

0.165

13

5.236

65

0.40

5.25

3.23

0.135

14

5.236

65

0.40

6.75

12.18

0.300

15

5.826

63

0.45

7.50

16.58

0.575

16

5.236

65

0.40

6.75

12.98

0.382

17

5.826

67

0.45

7.50

29.85

0.886

18

4.646

63

0.35

7.50

7.01

0.109

19

5.236

61

0.40

6.75

8.59

0.305

20

6.416

65

0.40

6.75

29.05

1.022

21

5.826

67

0.35

7.50

3.80

0.084

22

5.826

63

0.35

6.00

12.95

0.515

23

4.646

63

0.45

6.00

2.42

0.095

24

5.826

67

0.45

6.00

6.30

0.245

25

4.646

67

0.45

6.00

3.51

0.126

26

4.646

67

0.35

6.00

10.62

0.258