Table 4 Experimental empirical formula for calculating plasma electron density based on the concentrations of the contaminant elements.
Element | Ne (cm−3), C (ppm) | |
---|---|---|
S1 | S2 | |
Cd | Ne = (1.317 + (348.8 × 10−5 × C)) × 1016 | Ne = (− 1.067 + (1944.3 × 10−5 × C)) × 1016 |
Fe | Ne = (1.566 + (0.0 × C)) × 1016 | Ne = (− 8.048 + (15488.0 × 10−5 × C)) × 1016 |
Zn | Ne = (− 1.631 + (2318.3 × 10−5 × C)) × 1016 | Ne = (1.190 + (632.0 × 10−5 × C)) × 1016 |
Ni | Ne = (1.563 + (0.0 × C)) × 1016 | Ne = (0.429 + (240.0 × 10−5 × C)) × 1016 |