Table 1 Banlanced process comparision for the dielectric surface potential when the primary electron energy, Ep, locates in various ranges.
Energy region | Irradiation condition: IP = 1 × 10–6 A, d = 1 × 10–3 cm, t = 1 × 10–9 s | |||
|---|---|---|---|---|
Charging type | Potential at balance state | Duration to reach balance state | Discharge risk | |
Ep < Ep1 | Negative | Dozens of volts | Hundreds of ns | Very low |
Ep > Ep2 | Negative | More than thousands volts | Thousands of ns | High |
Ep1 < Ep < Ep2 | Positive | Several volts | Several to dozens of ns | About 0 |
