Table 1 Design parameters of the proposed sensor.

From: Investigation into electro mechanical behaviour of MEMS wing shaped dielectric capacitive pressure sensor conforming to set boundary conditions and sizing tolerances

Parameters

Design Value

Young’s Modulus

\(170\times {10}^{9} \text{N}/{\text{m}}^{2}\)

Radius of diaphragm (a)

180 μm

Thickness of the diaphragm (h)

10 μm

Gap Depth (g)

2 μm

Thickness of the insulating layer (t)

0.5 μm

Wings Slant length (l)

3.6 μm

Slant angle

33.8°

Poisson’s ratio for silicon (\(\boldsymbol{\vartheta }\))

0.28

Normal mode pressure range

0–0.28 MPa

Touch mode pressure range

0.28–1.75 MPa

Saturation mode pressure range

Beyond 1.75 MPa

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