Table 2 Key Performance Parameters Comparison Between Proposed Sensor and Reported Designs.
Sensor type | Substrate & diaphragm | Size (μm) | Capacitance values obtained in pF | Capacitive Sensitivity in 10–16 F/Pa | Linear operation range in MPa |
|---|---|---|---|---|---|
STMCPS27 | Fixed electrode & Circular | a = 180, h = 5, and g = 2 | 9.8 | 0.095 | 0.2–1.6 |
STMCPS28 | Concave well & Circular | a = 180, h = 5, g = 2 | 3.25 | 0.021 | 0.4–1.4 |
DTMCPS29 | Convex & Circular | a = 180, h = 5, and g = 2 | 8.5 | 0.181 | 0.2–1.4 |
DTMCPS30 | Concave & Circular | a = 180, h = 5, g = 2, and gn = 1 | 6.2 | 0.19 | 0.2–1.1 |
Proposed work | Wing-shaped dielectric | a = 180, h = 10, and g = 3 | 15.9 | 0.4 | 0.3–1.75 |
