Table 1 The time differences with and without a quartz slab inserted in the quartz process tube. The results shown are the averages of the two processes. The process temperature was set to 900 °C, and the sulfur heater temperature to 130 °C.

From: Technological limitations of solid-source chemical vapor deposition of van der Waals heterostructures

 

Time between turning on furnace heating and furnace reaching the set temperature (mm: ss)

Time between turning on furnace heating and sulfur heater reaching the set temperature (mm: ss)

Time between turning on the furnace heating and sulfur starting to melt (mm: ss)

Time between turning on the furnace heating and turning on the sulfur heating at 700 °C (mm: ss)

With quartz slab

25:10

20:42

23:23

17:05

Without quartz slab

23:50

19:54

23:00

16:12

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