Table 3 The differences in the evaporated S depending on the process parameters. The initial weight of sulfur was 1000 ± 3 mg.
Furnace temperature (°C) | Pressure (mbar) | Growth time (min) | Ar flow (sccm) | S heater temperature (°C) | Sulfur heater start temperature (°C) | Length of sulfur heater (mm) | Difference in S weight (mg) |
|---|---|---|---|---|---|---|---|
900 | 950 | 15 | 100 | 130 | 700 | 100 | 22.2 |
900 | 950 | 15 | 100 | 150 | 700 | 100 | 44.8 |
700 | 950 | 15 | 100 | 130 | 550 | 100 | 10.1 |
800 | 950 | 15 | 100 | 130 | 600 | 100 | 15.8 |
1000 | 950 | 15 | 100 | 130 | 800 | 100 | 46.6 |
1100 | 950 | 15 | 100 | 130 | 1000 | 100 | 80.1 |
900 | 0.3 | 15 | 100 | 130 | 700 | 100 | 1002.3 (all) |
900 | 20 | 15 | 100 | 130 | 700 | 100 | 114.9 |
900 | 20 | 15 | 100 | 130 | 700 | 220 | 231.2 |
900 | 20 | 15 | 100 | 150 | 700 | 220 | 678.8 |
900 | 20 | 30 | 100 | 130 | 750 | 220 | 433.8 |
900 | 20 | 3 | 100 | 130 | 750 | 220 | 50.3 |
900 | 200 | 15 | 100 | 130 | 700 | 100 | 58.6 |
900 | 400 | 15 | 100 | 130 | 700 | 100 | 44.4 |
900 | 600 | 15 | 100 | 130 | 700 | 100 | 33.8 |
900 | 800 | 15 | 100 | 130 | 700 | 100 | 31.2 |
900 | 950 | 15 | 30 | 130 | 700 | 100 | 23.6 |
900 | 950 | 15 | 500 | 130 | 700 | 100 | 20.1 |
900 | 950 | 15 | 10,000 (N2) | 130 | 700 | 100 | 7.6 |
