Table 4 Dimensions of the L-shaped capacitive pressure sensor.
From: Design and analysis of capacitive pressure sensor with L shaped electrode for enhanced sensitivity
Parameter | Dimension (mm) |
|---|---|
Length of the long side of L-plate | 40 |
Length of the short side of L-plate | 20 |
The thickness of all the plates | 3 |
Length of the reference plate | 18 |
Depth of all the electrodes | 15 |
