Table 5 Comparison of the sensitivity of the L-shaped capacitive sensor with other pressure sensors.

From: Design and analysis of capacitive pressure sensor with L shaped electrode for enhanced sensitivity

Paper

Sensor

Sensitivity

30

Capacitive pressure sensors with circular and square geometries

8.01 × 10−5 pF/Pa

31

Robust differential capacitive sensor with a grounded shield window

0.2 pF/mm

32

Cylindrical shell capacitive pressure sensor

2.312 × 10−21 pF∕Pa

Proposed sensor

L-shaped capacitive pressure sensor

1.68885 × 10−3 pF/Pa or 1.68885 pF/mm

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