Fig. 8

Photographs and optical microscope images corresponding to each process outlined in Fig. 4: (a) Photograph and optical microscope images after PR development as presented in Fig. 4(d); (b) Optical microscope images after SOG etching, as illustrated in Fig. 4(e); (c) Photograph and optical microscope images after PR removal, as presented in Fig. 4(f). The cross-sectional views represent split surfaces indicated by dotted lines in the top views.