Fig. 2
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
Schematic of the sensor array with seven sensors: (a) Sensor sub-assembly cross section showing the STM Nucleo L432KC board, the DC converter, the pin socket, the sensor C12666MA and an LED; (b) 3D models of the array sensor holder and the lateral and front locks of the sensor devices. The top picture shows sensor zones A1-A2, B and C, and sensor positions 1-7; (c) Front and back isometric views of the array full assembly; (d) Front view of the multi-sensor array in static measurement configuration.
