Fig. 4
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance

Model of the VAE system for generating a latent space Riemannian manifold. The latent space \(q_\zeta (z | \theta )\) is used to generate the Riemannian metric \(\textbf{M}\), which is used to determine whether the manipulator is experiencing joint drift. The estimate of the constraint function \(\hat{\textbf{f}}(\theta )\) is computed from decoding the latent space and computing the manifold constraint function.