Fig. 7
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
Comparison of the proposed sensor array against the Filmetrics F20 reflectometer.
Fig. 7 | Scientific Reports
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
Comparison of the proposed sensor array against the Filmetrics F20 reflectometer.
