Fig. 8
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
Wafer inspection experiments with robot manipulator: (a) Robot arm movement from an idle/load position to the calibration point. The green rectangle shows the wafer and a 3D-printed end effector. (b) Zoom-in of the end effector and the wafer. (c) Circular trajectory. (d) Back & forth trajectory.
