Table 3 Data of Fig. 7 including uncertainty calculation. All the tests were performed under controlled room temperature environment and using a Filmetrics reference standard for calibration purposes. *Estimated uncertainty.
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
F20 measurements | Sensor Array measurements | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Sample | Vendor | Expected Thickness (nm) | Sample size | Thickness (nm) | Type A Uncertainty (nm) | Combined* Uncertainty (nm) | Expanded* Uncertainty (nm) | Sample size | Thickness (nm) | Error (%) | Std Dev (nm) | Type A Uncertainty (nm) | Combined Uncertainty (nm) | Expanded Uncertainty (nm) |
1 | Pi-Kem | 300 ± 60 | 240 | 303.90 | 0.01 | 0.80 | 1.61 | 10581 | 300.25 | 1.20 | 4.53 | 0.04 | 1.28 | 2.57 |
2 | Pi-Kem | 300 ± 60 | 240 | 285.76 | 0.01 | 0.80 | 1.61 | 10585 | 286.06 | 0.08 | 4.68 | 0.05 | 1.28 | 2.57 |
3 | Inseto | 150 ± 15 | 240 | 161.36 | 0.01 | 0.80 | 1.61 | 10348 | 164.74 | 2.10 | 4.60 | 0.05 | 1.28 | 2.57 |
