Table 4 Evaluation of the trajectory reconstruction and direct constraint estimation difference between the ground truth and the values from the latent space manifold. The mean value \(\mu\) is the average difference between the actual ground truth and the reconstructed output from the VAE with the standard deviation \(\sigma\) over the trajectory.
From: Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance
Trajectory | Reconstruction Accuracy | Manifold Constraint Estimation | ||
|---|---|---|---|---|
\(\mu\) | \(\sigma\) | \(\mu\) | \(\sigma\) | |
On-Manifold | -0.18 | 0.24 | -0.014 | 1.81 |
Off-Manifold 1 | -0.08 | 0.23 | -1.30 | 2.68 |
Off-Manifold 2 | -0.003 | 0.30 | 0.82 | 1.49 |
Off-Manifold 3 | -0.16 | 0.30 | -0.11 | 2.28 |
