Fig. 7

GD-OES quantitative depth profiles of the coating at 350 °C 30% O2, 0.04% precursor at a pressure of (a) 4 mbar (b) 10 mbar, (c) 25 mbar and (d) 42 mbar.

GD-OES quantitative depth profiles of the coating at 350 °C 30% O2, 0.04% precursor at a pressure of (a) 4 mbar (b) 10 mbar, (c) 25 mbar and (d) 42 mbar.