Fig. 5

(a) SEM image of a crater milled in ASA with the aperture corresponding to a current of 0.1 nA; (b) removal rate (µm3/nC) vs. time for different ion currents, for ASA and for PC.
(a) SEM image of a crater milled in ASA with the aperture corresponding to a current of 0.1 nA; (b) removal rate (µm3/nC) vs. time for different ion currents, for ASA and for PC.