Table 2 Predefined dimensions based on tool pathway in a local strand.
 | In a local strand | ||
---|---|---|---|
Local ladder-strand distance (\(\:\varvec{\mu\:}\varvec{m}\)) | Nlong (n) | Nshort (n) | |
Group A | 357 | 27 | 3 |
Group B | 250 | 21 | 3 |
Group C | 192 | 15 | 5 |
 | In a local strand | ||
---|---|---|---|
Local ladder-strand distance (\(\:\varvec{\mu\:}\varvec{m}\)) | Nlong (n) | Nshort (n) | |
Group A | 357 | 27 | 3 |
Group B | 250 | 21 | 3 |
Group C | 192 | 15 | 5 |