Fig. 1
From: Mechanical characterization and cleaning of CVD single-layer h-BN resonators
CVD single-layer h-BN growth and dry transfer. a Large-area single-layer h-BN is grown by chemical vapor deposition (CVD) on Fe foils, and it is coated with PMMA (i). Then, the h-BN/PMMA stack is delaminated from the foil by means of bubbling17 (ii, iii). The h-BN is transferred to a Si/PVA substrate, and the PMMA is removed with acetone (iv–vi). PDMS is placed on the Si/PVA/h-BN (viii), and the structure is left floating on DI water (ix). When the Si substrate detaches from the layer stack (x), the h-BN/PDMS is picked and dried. From this point, the usual viscoelastic dry transfer technique33 is used to transfer the CVD single-layer h-BN on patterned substrates (xi-xii). b Scanning electron microscope image of CVD single-layer h-BN covering circular cavities of 5 µm in diameter (top panel). Since h-BN is an insulator, electrons are trapped in the suspended material and appear with high contrast. A flat drum with a few wrinkles is shown in the bottom panel
