Table 1 Tension and Young’s modulus values determined from AFM nanoindentation measurements for five different drums of 5 µm in diameter

From: Mechanical characterization and cleaning of CVD single-layer h-BN resonators

Device

N 0 (10−3 N/m)

E (GPa)

1

21

102

2

25

199

3

21

186

4

38

81

5

48

936

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