Fig. 2: Fabrication of the diamond membrane and transfer on 2D magnets.
From: Nitrogen-vacancy magnetometry of CrSBr by diamond membrane transfer
a An SEM image of the diamond membrane etched into the 50 × 50 × 5 μm3 squares by O2 plasma. b Detaching a single square of the diamond-membrane by a metallic tip (shown in blue) that is controlled by micro-manipulators. After the detachment, the membrane drops on a polydimethylsiloxane (PDMS) layer that is held on a substrate (here called PDMS 1). c A PMMA-PDMS stamp (prepared separately by suspension of PMMA membrane, described in the Methods section) is vertically brought in contact with the diamond membrane by a micro-manipulator. Adhesion of the diamond to the PMMA allows for the pick-up of the diamond membrane by retracting the PMMA-PDMS stamp. d Transfer of the diamond on top of a CrSBr flake that is located next to the Au stripline on a SiO2-Si substrate. The optical micrograph shows the region defined by the black dashed line (the scale bar is 10 μm). e By melting the PMMA at 180 °C the PMMA and diamond membranes are released on top of the SiO2 substrate, leaving the diamond on the target CrSBr flake within a few micron precision. As shown in the optical micrograph, the PMMA membrane is removed by e-beam lithography at the region of interest.
