Table 3 Benchmarking between different M3D integration approaches with 2DMs

Grain size (µm)

1 ~ 180^232,233

0.1 ~ 0.4²²¹

1 ~ 3⁵⁵

TFT mobility (cm²V^-1s^-1)

< 54.0^234,235

< 35.9^220,221

< 27.0³⁵

Mechanical flexibility

Low¹⁶⁵

Low¹⁶⁵

High¹⁶⁵

Stacking efficiency

Low²¹⁶

Medium²²⁰

High³³

Conformality

Medium²¹⁴

High²²⁰

High^35,236

Cost

High²³⁷

High²²⁰

Low⁶⁵

Technology maturity

Medium

Low

Low