Abstract
Graphene is of great scientific and commercial interest due to its unique physical properties, including exceptionally high carrier mobility and light transparency over a wide wavelength range. Graphene forms a heterojunction with silicon, which can result in a Schottky barrier diode with a depletion region that extends into the silicon. These diodes can act as photodetectors because photons entering the depletion region generate electron-hole pairs, which are separated and contribute to a photocurrent. Although graphene-silicon Schottky photodiodes (GSSDs) have been investigated for over a decade, their maturity for commercial application has yet to be demonstrated. Here, we applied industry-standard semiconductor encapsulation techniques to our GSSDs and investigated devices in commercially available packages. Our GSSDs show significantly higher responsivities in the ultraviolet spectrum than commercially available silicon photodetectors before and after packaging. Moreover, packaged GSSDs greatly outperform commercial gallium nitride photodetectors and match the responsivities of silicon carbide photodiodes in the ultraviolet (UV) range. The packaged devices additionally underwent three industrial lifetime stress tests. They showed stable dark- and photocurrents for over 900 h, passing the harsh conditions of industrial stress tests. Overall, our results demonstrate the potential of GSSDs as promising alternatives to conventional photodiodes.
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References
Morozov, S. V. et al. Giant intrinsic carrier mobilities in graphene and its bilayer. Phys. Rev. Lett. 100, 016602 (2008).
Nair, R. R. et al. Fine structure constant defines visual transparency of graphene. Science 320, 1308–1308 (2008).
Koppens, F. H. L. et al. Photodetectors based on graphene, other two-dimensional materials and hybrid systems. Nat. Nanotechnol. 9, 780–793 (2014).
Li, W. et al. Broadband optical properties of graphene by spectroscopic ellipsometry. Carbon 99, 348–353 (2016).
Di Bartolomeo, A. Graphene Schottky diodes: An experimental review of the rectifying graphene/semiconductor heterojunction. Phys. Rep. 606, 1–58 (2016).
Riazimehr, S. et al. High photocurrent in gated graphene–silicon hybrid photodiodes. ACS Photonics 4, 1506–1514 (2017).
Romagnoli, M. et al. Graphene-based integrated photonics for next-generation datacom and telecom. Nat. Rev. Mater. 3, 392–414 (2018).
Burton, O. J. et al. Integrated wafer scale growth of single crystal metal films and high quality graphene. ACS Nano 14, 13593–13601 (2020).
Quellmalz, A. et al. Large-area integration of two-dimensional materials and their heterostructures by wafer bonding. Nat. Commun. 12, 917 (2021).
Chung, Y.-Y. et al. First demonstration of GAA monolayer-MoS2 nanosheet nFET with 410μA/Μm ID at 1V VD at 40nm gate length. In 2022 International Electron Devices Meeting (IEDM); p 34.5.1-34.5.4. https://doi.org/10.1109/IEDM45625.2022.10019563 (2022).
Wittmann, S. et al. Assessment of wafer-level transfer techniques of graphene with respect to semiconductor industry requirements. Adv. Mater. Technol. 8, 2201587 (2023).
Canto, B. et al. Multi-project wafer runs for electronic graphene devices in the European 2D-experimental pilot line project. Nat. Commun. 16, 1417 (2025).
Park, J., Ahn, Y. H. & Ruiz-Vargas, C. Imaging of photocurrent generation and collection in single-layer graphene. Nano Lett. 9, 1742–1746 (2009).
Mueller, T., Xia, F. & Avouris, P. Graphene photodetectors for high-speed optical communications. Nat. Photon 4, 297–301 (2010).
Lemme, M. C. et al. Gate-activated photoresponse in a graphene p–n junction. Nano Lett. 11, 4134–4137 (2011).
Echtermeyer, T. J. et al. Strong plasmonic enhancement of photovoltage in graphene. Nat. Commun. 2, 458 (2011).
Engel, M. et al. Light–matter interaction in a microcavity-controlled graphene transistor. Nat. Commun. 3, 906 (2012).
Furchi, M. et al. Microcavity-integrated graphene photodetector. Nano Lett. 12, 2773–2777 (2012).
Konstantatos, G. et al. Hybrid graphene–quantum dot phototransistors with ultrahigh gain. Nat. Nanotechnol. 7, 363–368 (2012).
Guo, X. et al. High-performance graphene photodetector using interfacial gating. Optica 3, 1066–1070 (2016).
Li, X. et al. High detectivity graphene-silicon heterojunction photodetector. Small 12, 595–601 (2016).
Fang, D., He, F., Xie, J. & Xue, L. Calibration of binding energy positions with C1s for XPS results. J. Wuhan. Univ. Technol. -Mater. Sci. Ed. 35, 711–718 (2020).
Huang, Z. et al. Interfacial gated graphene photodetector with broadband response. ACS Appl. Mater. Interfaces 13, 22796–22805 (2021).
Yoshioka, K. et al. Ultrafast intrinsic optical-to-electrical conversion dynamics in a graphene photodetector. Nat. Photonics 16, 718–723 (2022).
Li, S. et al. Graphene-PbS quantum dot hybrid photodetectors from 200 Mm wafer scale processing. Sci. Rep. 15, 14706 (2025).
Riazimehr, S. et al. High responsivity and quantum efficiency of graphene/silicon photodiodes achieved by interdigitating schottky and gated regions. ACS Photonics 6, 107–115 (2019).
Riazimehr, S. et al. Spectral sensitivity of graphene/silicon heterojunction photodetectors. Solid-State Electron 115, 207–212 (2016).
Selvi, H. et al. Towards substrate engineering of graphene–silicon Schottky diode photodetectors. Nanoscale 10, 3399–3409 (2018).
Selvi, H., Hill, E. W., Parkinson, P. & Echtermeyer, T. J. Graphene–silicon-on-insulator (GSOI) Schottky diode photodetectors. Nanoscale 10, 18926–18935 (2018).
Wan, X. et al. A self-powered high-performance graphene/silicon ultraviolet photodetector with ultra-shallow junction: Breaking the limit of silicon? Npj 2D Mater. Appl. 1, 4 (2017).
Tian, F. et al. High quantum efficiency ultraviolet photodetector based on graphene and truncated silicon nanocones. Sci. China Inf. Sci. 68, 140405 (2025).
Zhang, Z.-X. et al. Graphene quantum dots enhanced graphene/Si deep ultraviolet avalanche photodetectors. IEEE Electron Device Lett. 45, 758–761 (2024).
Pelella, A. et al. Graphene–silicon device for visible and infrared photodetection. ACS Appl. Mater. Interfaces 13, 47895–47903 (2021).
Melios, C., Giusca, C. E., Panchal, V. & Kazakova, O. Water on graphene: Review of recent progress. 2D Mater. 5, 022001 (2018).
Pecunia, V. et al. Guidelines for accurate evaluation of photodetectors based on emerging semiconductor technologies. Nat. Photonics 19, 1178–1188 (2025).
Green, M. A. Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients. Sol. Energy Mater. Sol. Cells 92, 1305–1310 (2008).
Lukas, S. et al. High-yield large-scale suspended graphene membranes over closed cavities for sensor applications. ACS Nano 18, 25614–25624 (2024).
Laser Components GmbH. SiC-Photodiode - 0.1mm2. https://www.lasercomponents.com/fileadmin/user_upload/home/Datasheets/ifw/sic-pd/jea0_1.pdf.
Laser Components GmbH. SiC-Photodiode - 0.25mm2. https://www.lasercomponents.com/fileadmin/user_upload/home/Datasheets/ifw/sic-pd/jea0_25.pdf.
sglux GmbH. SG01D–C18. https://download.sglux.de/photodiodes/SG01D-C18.pdf.
EPIGAP Optoelektronik GmbH. GaP – UV-Photodiodes (190 - 570 Nm) EPD-440-0 Schottky Barrier Type. https://www.farnell.com/datasheets/10245.pdf.
Thorlabs. FGAP71. https://www.thorlabs.com/catalogpages/Obsolete/2020/FGAP71.pdf.
Advanced Photonix Inc. SMT Photodiode Assembly SD 019-101-411. https://mm.digikey.com/Volume0/opasdata/d220001/medias/docus/2610/SD%20019-101-411.pdf.
OSI Optoelectronics. UV Enhanced Series. https://www.osioptoelectronics.com/media/pages/products/photodetectors/uv-enhanced-100-qe/uv-005/a6e223e35a-1675100383/uv-enhanced-inversion-layer-photodiodes.pdf.
Acknowledgements
This work received funding from the European Union’s Horizon 2020 Research and Innovation Program under the Graphene Flagship Core 3 (881603), by the German Federal Ministry of Education and Research, BMBF, within the GIMMIK project (03XP0210), and by the German Research Foundation (INST 221/96-1). We thank Dr. Dirck Sowada and Anika Kühnle for their technical support with the optical characterizations, and Michael Baumann for his assistance with packaging the GSSDs.
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M.C.L. and H.D.B.G. conceived the experiments. A.E. fabricated the devices. A.E., C.G., and J.A. performed the optoelectronic measurements and material characterization. M.C.L. and H.D.B.G. supervised the work. All authors discussed the results and contributed to the preparation of the manuscript. A.E. and C.G. wrote the initial manuscript and prepared the figures. All authors revised the manuscript.
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Esteki, A., Gebauer, C.P., Avci, J. et al. High UV sensitivity in graphene-silicon Schottky photodiodes in industry standard packaging. npj 2D Mater Appl (2026). https://doi.org/10.1038/s41699-026-00678-1
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DOI: https://doi.org/10.1038/s41699-026-00678-1


