Extended Data Fig. 5: Experimental comparison of EFM lateral resolution and electrical contrast at different frequencies.
From: Nanoscale imaging of mobile carriers and trapped charges in delta doped silicon p–n junctions
Experimental comparison of EFM lateral resolution and electrical contrast on dopant test sample measured at different frequencies. Histograms are shown as black insets. We found best contrast at measurement frequencies of 10–100 MHz as can be seen in the insets.
