Fig. 2: Mechanical characterization of SrTiO₃ (STO) and SrRuO₃ (SRO) nanodrums.

Resonance frequency measurements of 20-nm-thick STO and 10 nm-thick SRO nanodrums. a, b Frequency spectra of two STO drums with diameters of a 3 μm and b 4 μm. The red lines are linear harmonic oscillator fits. The extracted quality factors are shown in each of the panels. c, d Frequency spectra of two SRO drums with diameters of c 5 μm and d 13 μm. The red lines are linear harmonic oscillator fits. The extracted quality factors are shown in each of the panels. e A wide-range frequency spectrum of the drum shown in b. The positions of the fundamental resonance mode (f₀) and the second resonance mode (f₁) are marked with vertical dashed lines. f A wide-range frequency spectrum of the drum shown in c. The positions of the fundamental resonance mode (f₀) and the second harmonic (f₁) are marked with vertical dashed lines. The magnitude is a dimensionless number defined as the ratio of the input and output voltage of the vector network analyser.