Fig. 2: Mode simulation and normalized transmission spectrum of the fundamental transverse electric (TE) mode at 3350 nm.

a Finite Element Mode (FEM) simulation of the fundamental TE mode for a silicon waveguide (2000 nm height (H) × 2400 nm width (W)) with oxide cladding and aluminum (Al) heater on top for a 150 μm bending radius. b Transmission spectrum of the microring at 3350 nm wavelength (λ) measured using a piezo controlled optical parametric oscillator (OPO) system. The measured linewidth is 323 MHz, corresponding to the loaded quality factor (QL) of \(2.8 \times 10^5\).