Fig. 6: Generated SZD and predicted microstructure classes.
From: Predicting structure zone diagrams for thin film synthesis by generative machine learning
a gSZD generated by the cGAN model for a variation of Al und Td. The remaining conditional parameters were chosen to be Id = 1.0, EI = 40 eV, O = 1 at%, Pd = 0.5 Pa. Panel b shows the average probability and standard deviation of the predicted microstructure classes of the gSZD by the CNN. The dashed blue lines indicate the technological boundary of the use case. Panel c shows the predicted microstructure classes for an increased EI of 200 eV.
