Fig. 2: Ionic and electronic transport dynamics of the aLLZO ultrathin films.

a Nyquist plot of the impedance spectra of an aLLZO film measured with blocking electrodes at room temperature. Inset shows a schematic of the device geometry. b Ionic and electronic conductivities of aLLZO films prepared with different mass fractions of LLZO and Li2O. c Activation energy of the ionic conductivity, d mobile Li+ concentration, and e Li+ mobility of aLLZO films with different amounts of Li2O based on the mean of three measurements each.