Fig. 2: Changes in NiAsx interfacial layer during in situ TEM heating. | Communications Materials

Fig. 2: Changes in NiAsx interfacial layer during in situ TEM heating.

From: Tunable metal contacts at layered black-arsenic/metal interface forming during metal deposition for device fabrication

Fig. 2

a A set of BF-TEM images of the stack of Si/SiO2 substrate, b-As film, deposited polycrystalline Ni, and the interfacial NiAsx layer showing a gradual expansion of the NiAsx layer with an increase of temperature going from TR = 22 °C to T = 292 °C. Grain growth in the NiAsx layer is also visible. Each image is accompanied by a diffraction pattern (below) obtained from the stack at the same temperature. The layer stack is oriented along [101] zone axis of b-As. Scale bars are 30 nm and 1 nm−1. The arced spots in the diffraction pattern at TR correspond to polycrystalline NiAsx (marked orange) and Ni layers (marked yellow). Progressive heating leads to the shortening of the arced spots from the polycrystalline NiAsx layer and the appearance of two strong spots. b ADF-STEM images of the stack after reaching T = 292 °C and cooling it down to TR. A High-resolution ADF-STEM image of the layer shows atomic columns of Ni11As8 crystal in [031] zone axis. Scale bars are 100 and 1 nm, respectively. c Atomic-resolution ADF-STEM image of the layer from another heating experiment showing the unique pattern of atomic columns of Ni11As8 crystal viewed along [100] zone axis. Scale bar is 1 nm. Insets in (b, c) are simulated ADF-STEM images of Ni11As8 in the same directions. d ADF-STEM image of the stack in (b) with EDX elemental maps of O (blue), As (green), and Ni (yellow) showing the complete transformation of the b-As film into Ni11As8. Light oxidation of the metal layers remains there even after the formation of Ni11As8. Scale bar is 100 nm.

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