Table 1 FESEM-EBSD surface (x-y plane) and FESEM-TKD cross-section (x-z) grain analysis illustrating the mean value and standard deviation for the minor axis, aspect ratio and mean area of the fitted ellipses as well as the grain density.

From: Probing the composition dependence of residual stress distribution in tungsten-titanium nanocrystalline thin films

 

W-Ti

Minor axis of ellipse

Minor axis of ellipse

Aspect ratio of fitted ellipse

Aspect ratio of fitted ellipse

Grain Density

Area of ellipse

 

at% Ti

nm

nm

µm−2

×103 nm2

  

Mean

Standard deviation

Mean

Standard deviation

 

Mean

Surface

15

58

29

1.86

0.62

105

4.6

20

60

30

1.94

0.62

83

5.2

30

50

22

2.07

0.70

150

3.9

TKD Cross- section

15

31

56

2.68

1.16

178

8.1

20

34

46

2.92

1.98

120

11.1

30

27

25

3.37

1.17

252

5.2

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