Fig. 11: Modulated thermoreflectance signals of helium-implanted films annealed under different conditions.
From: Improving the thermoelectric performance of scandium nitride thin films by implanting helium ions
a Amplitudes and b phases of modulated thermoreflectance measurements performed on the ScN Reference, as-implanted, implanted then annealed at 673 K, and implanted then annealed at 1273 K films.
