Fig. 6: Transmission Electron Microscopy micrographs of a helium-implanted film annealed at 1273 K.
From: Improving the thermoelectric performance of scandium nitride thin films by implanting helium ions
Bright field micrographs under 3-waves configuration, showing the presence of the He-implantation-induced nanocavities. The cavities distribution in the film is still aligned along grain boundaries. However, the density of nanocavities has increased compared to the as-implanted sample.
