Fig. 2: High-resolution reciprocal space maps.
RSM of the 10\(\bar{1}\)5 reflections of sputtered 100-nm-thin a AlN and b Al0.89Sc0.11N grown on GaN.
Fig. 2: High-resolution reciprocal space maps. | Communications Materials
RSM of the 10\(\bar{1}\)5 reflections of sputtered 100-nm-thin a AlN and b Al0.89Sc0.11N grown on GaN.
