Fig. 6: A schematic for the operation concept of the MEMS network hardware performing signal classification.
From: Energy efficient integrated MEMS neural network for simultaneous sensing and computing
The blue-colored texts indicate the applied bias voltages. a Schematic of the device along with applied bias voltages. Since Vb3 is larger than Vb1, the interaction force between M2 and M3 is larger than between M2 and M1. b An abrupt signal is applied to the inputs and M1 and M3 pull-in simultaneously. A larger interactive force causes M2 to move downward. c A ramp signal is applied, and M1 pull-in first as the exerted force from comb-drive 1 is larger. Finally, in panel d, the downward pull-in of M1 decreases the gap size in the interacting electrodes 2-1. As a result, M2 is pushed out of stability and an upward pull-in occurs.
