Fig. 7: Schematic diagram and experimental results of the MEMS network hardware operating a signal classifier.
From: Energy efficient integrated MEMS neural network for simultaneous sensing and computing
All microscopic images share the same scale bar. a Schematic diagram showing applied bias voltage to different components; b Optical microscope view of different areas of the fabricated device at rest; c Abruptly increasing the input voltage to 61 volts: both M1 and M3 are pulled-in simultaneously and M2 is pulled towards the element with which it has a stronger coupling (attracted to M3 by a downward pull-in); d Ramp input voltage: when input voltage reaches 56 volts M1 and consequently M2 go into pull-in (M1 downward and M2 upward); e Ramp signal continued: when the input voltage reaches 61 volts M3 also enters pull-in but does not pull M2 downward.
