Table 3 Comparison table of On-chip solar cells

From: On-chip solar power source for self-powered smart microsensors in bulk CMOS process

Reference

18

20

26

28

29

31

This work

Process

0.35 μm Bulk CMOS

0.18 μm Bulk CMOS

0.18 μm Bulk CMOS

0.18 μm CMOS

0.25 μm

CMOS

0.18μm Bulk CMOS

0.18 μm Bulk CMOS

Technical Features

NW with p+ fingers

Backside-illuminated

Triple-well

Triple-well

Two photodiodes in series

IBC-PVs

Triple-well (Device I)

Triple-well Segmentation & metal optimization (Device II)

Light source

Green laser (532 nm)

Laser (980 nm)

White LED

Halogen lamp

Laser (830 nm)

980 nm illumination

Solar simulator

Solar simulator

Incident light intensity

34.2 μW

5 mW

31 klux

1.13 mW/mm2

79.45 μW/mm2

1 mW

1 mW/mm2

1 mW/mm2

Footprint Area (mm2)

0.000338

1.52

0.0136

1.3

0.2 + 1.3a

N/A

0.01

0.01

Voc (V)

0.533

0.6

0.52

0.53

0.8a

N/A

0.49

0.495

Isc (μA)

0.23

3826

0.92

750

6.24a

N/A

5.72

6.72

Pout (μW)

0.076b

1668.9

N/A

322

4.17a

N/A

2.195

2.58

FF

0.62

0.73

N/A

0.81

0.84a

N/A

0.78

0.78

Eff. (%)

24

33.37

N/A

21.9

3.5a

20.33

21.95

25.79

  1. aTwo-photodiode stacked configuration.
  2. bEstimated from relevant literature.