Fig. 3: Characterization of the triple-MEMS resonator probe and its acoustic jetting performance.

a Optical images of the triple-MEMS resonator probe and its packaging. b Jetting force of resonators with different sizes under various input powers. c High-speed microscopy images showing jet streams generated by the triple-resonator probe. d Rotation speed of the tissue sample under different power levels. Error bars represent mean ± standard deviation from n = 3 independent samples.