Table 1 Comparison of responsive materials applied in TFAs

From: Thin-film actuators (TFAs): a review

TFA type

Responsive materials

Favorable material properties

Fabrication processes

Thermo-driven

• PDMS

• Shape memory alloys

• Graphene

• MXene

• High thermal stability

• High flexibility

• High ductility

• High thermal expansion coefficient

• Casting

• Molding

• Direct bonding

• PVD/CVD

Electro-driven

• Conductive carbon materials

• Dielectric elastomers

• Ionic polymer-metal composites

• High electrical conductivity

• High dielectric constant

• High thermal stability

• Fast response

• Lamination

• Electrospinning

• Casting

• Molding

Light-driven

• Graphene

• Carbon nanotubes (CNTs)

• Liquid crystal elastomers (LCEs)

• Azobenzene-based polymer

• High photothermal conversion efficiency

• Photo-reactivity

• Wavelength selectivity

• High light transmittance

• Vacuum filtration

• Casting

• Coating

• Self-assembly

Humidity-driven

• Graphene oxide

• Carbon nanotubes (CNTs)

• MXene

• Cellulose

• Sodium alginate

• High hygroscopic stability

• High flexibility

• High hygroscopic expansion coefficient

• Water diffusivity

• Vacuum filtration

• Hot pressing

• Chemical cross-linking

Chemical-driven

• Polyacrylate

• Polyamino acids

• PVDF

• High pH or chemical vapor sensitivity

• Reversibility

• High chemical stability

• Casting

• Electrospinning

• Chemical cross-linking