Table 3 TDoE #3 Experimental Structure and Extent of Nitriding
Experiment | Time1 (h) | Temperature1 (°C) | Time2 (h) | Temperature2 (°C) | N2-4H2 flow rate (sccm) | Extent nitridation |
|---|---|---|---|---|---|---|
1 | 8 | 1390 | 4 | 1400 | 400 | 26.17% |
2 | 8 | 1390 | 4 | 1410 | 500 | 76.95% |
3 | 8 | 1390 | 4 | 1450 | 600 | 82.30% |
4 | 8 | 1390 | 8 | 1400 | 600 | 46.48% |
5 | 8 | 1390 | 8 | 1410 | 400 | 80.76% |
6 | 8 | 1390 | 8 | 1450 | 500 | 86.21% |
7 | 8 | 1390 | 12 | 1400 | 500 | 60.29% |
8 | 8 | 1390 | 12 | 1410 | 600 | 86.14% |
9 | 8 | 1390 | 12 | 1450 | 400 | 82.84% |
