Figure 5
From: Femtosecond Laser Processing by Using Patterned Vector Optical Fields
Fabrication of multi-microholes by the fs PVOF composed of seven identical AV-LP-VFs with m = 1 and a = 1.1 mm, which arrange a face-centered hexagon.
(a) and (b) are two generated PVOFs composed of seven radially-polarized fields and seven azimuthal-polarized fields, respectively, where the arrows show the SoP configurations. (c) shows the simulated focal ring of any individual AV-LP-VF. (d) is the simulated interference pattern of seven identical fields, exhibiting a trigonal lattice. (e) indicates the simulated pattern of the focused PVOF, which contains six bright spots exhibiting a hexagon. (c)–(e) have a dimension of 60 × 60 μm2. (f) is the SEM image of the multi-microholes fabricated by 50 pulses at a fluence of about 6.9 J/cm2.
