Figure 3

(a) I–V curves of the AlN MSM PDs measured in the dark at different working temperatures.
(b) PDCR value as function of temperature under 5 V bias and 185-nm light illumination (Ilight = 100 mW/m2). (c) I–V curves of the AlN MSM PDs as a function of fluence of 2-MeV proton irradiation measured in the dark at room temperature. (d) PDCR value as function of 2-MeV proton irradiation fluence under the bias of 5 V and 185-nm light illumination (Ilight = 100 mW/m2) at room temperature.