Figure 4
From: Real-time identification of the evolution of conducting nano-filaments in TiO2 thin film ReRAM
Comparison of the JMA kinetics fitting results between PEALD and sputtered TiO2.
(a) and (c) shows the evolution of the reduced leakage current with time for the PEALD and sputtered samples, respectively. The inset figures show schematic diagrams of the CF evolution corresponding to the first and second stages. (b) and (d) shows the distribution of the Avrami exponent of first stages of the PEALD and sputtered samples, respectively.
