Table 2 Parameter values obtained from fitting the FS–load plots under different external applied voltage with equation (2)
From: Large Electric Field–Enhanced–Hardness Effect in a SiO2 Film
Tip Bias (V) | E (kV/cm) | Slope | Intercept | Adj R–square |
|---|---|---|---|---|
0 | 0 | 0.390 | 9.89 | 0.996 |
3 | 54.5 | 0.339 | 27.18 | 0.991 |
6 | 109 | 0.324 | 38.33 | 0.995 |
9 | 164 | 0.307 | 39.93 | 0.984 |
12 | 218 | 0.297 | 40.59 | 0.992 |
