Figure 4

Properties of tin oxide films on ALD-Al₂O₃ and SD-Al₂O₃ (a) XRD patterns of the tin oxide films deposited on Si/ALD-Al₂O₃ and Si/SD-Al₂O₃. High resolution cross-sectional TEM images of tin oxide films deposited on (b) Si/ALD-Al₂O₃ and (c) Si/SD-Al₂O₃. AFM images of tin oxide films deposited on (d) Si/ALD-Al₂O₃ and (e) Si/SD-Al₂O₃.